Blar i SINTEF Open på forfatter "Gastinger, Kay"
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Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS
Gastinger, Kay; Haugholt, Karl Henrik; Røyset, Arne Karstein (Chapter, 2009)The EU-project SMARTIEHS (SMART InspEction system for High Speed and multi-functional testing of MEMS and MOEMS) develops a new inspection concept for MEMS and MOEMS (M(O)EMS) testing on the wafer level. The inspection ... -
MICROSCOPIC NEAR INFRARED (NIR) IMAGING FOR INVESTIGATION OF THE SAW-CHANNEL SURFACE DURING WIRE-SAWING OF SILICON
Johnsen, Lars; Gastinger, Kay (Lecture, 2010)A setup for high resolution video recording of the chipping process during slurry based sawing of silicon is introduced. The setup allows in situ imaging of the chipping process in silicon (Si) by operating in the near ... -
Near infrared low coherence speckle interferometry (NIR-LCSI) as a tool for the investigation of silicon in solar cell production
Gastinger, Kay; Johnsen, Lars (Journal article; Peer reviewed, 2010)